The semiconductor industry has developed its own standards, which are widely supported, particularly in the front-end of production.
We have experience here in both equipment-side automation (SECS interface) and equipment integration in the fab.
We use interface testing software SECSIM Pro®, DiDACT from PEER Group to verify the interface’s compliance with the SEMI standard and/or customer-specific scenarios.
SEMI Standards that we use include (among others)
- E5 SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)
- E10 SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM)
- E30 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM – Generic Equipment Model)
- E37 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES
- E40 STANDARD FOR PROCESSING MANAGEMENT
- E84 SPECIFICATION FOR ENHANCED CARRIER HANDOFF PARALLEL I/O INTERFACE
- E87 SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
- E90 SPECIFICATION FOR SUBSTRATE TRACKING
- E94 SPECIFICATION FOR CONTROL JOB MANAGEMENT
Equipment Automation
- Supporting the mapping of equipment processes to the SEMI status models
- Experience with the PTO® framework
Factory Integration
- Support in determining the SEMI compliance of the equipment interface
- Support in connecting to Factory Services according to the fab’s operational scenarios (E87, E94, E40, E90 etc.)